Instability analysis of torsional MEMS/NEMS actuators under capillary force
نویسندگان
چکیده
منابع مشابه
Capillary force actuators: Modeling, dynamics, and equilibria
Capillary force actuators provide forces via the alteration of the capillary pressure within a conducting liquid bridge through the application of electrical potential. A dynamic model of a capillary force actuator is developed. Separate models of the fluid/flexured platen and electrodynamics are constructed and linked together via the Young–Lippmann relation. Since the bridge height is small i...
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ژورنال
عنوان ژورنال: Journal of Colloid and Interface Science
سال: 2009
ISSN: 0021-9797
DOI: 10.1016/j.jcis.2008.11.069